Atomic Layer Deposition of copper - If you like sputtering, you'll love this!

Share this & earn $10
Applied Science
Published at : 23 Sep 2021
257274 views
13392
110

An explanation and demo of atomic layer deposition (ALD) of copper metal on glass. Precursors are copper(I) chloride and hydrogen, processed in a hot-wall tube quartz tube furnace.

10 torr operating pressure
500 sccm argon sweep/purge gas constantly flowing
75 sccm CuCl argon pulse gas (17 seconds including flow controller lag)
100 sccm H pulse gas (14 seconds including flow controller lag)
7 second purge time between pulses
100mm quartz tube furnace diameter
415C deposition temperature
350
C CuCl evaporation temperature
Substrates are mostly borosilicate glass cleaned with RCA clean
The "good" samples shown in the video are about 750 cycles (about 9 hours

Main ref:
https://sci-hub.se/https://doi.org/10.1002/cvde.19970030107
Also helpful:
https://sci-hub.se/https://doi.org/10.1063/1.5087759
https://sci-hub.se/10.1149/2.0261501jss
https://sci-hub.se/https://doi.org/10.1016/0022-0248(92)90191-K

Alicat flow controller manuals (hard to find via website navigation):
https://documents.alicat.com/manuals/DOC-MANUAL-MC.pdf
https://documents.alicat.com/manuals/old/Gas_Flow_Controller_Manual_rev7.pdf
https://documents.alicat.com/Alicat-Serial-Primer.pdf

RCA clean: https://en.wikipedia.org/wiki/RCA_clean

CuCl synthesis: http://wwwchem.uwimona.edu.jm/lab_manuals/c1901exp35.html

Support Applied Science on Patreon: https://www.patreon.com/AppliedScience

AtomicLayerDeposition

The Build Up 2 | Drama Short Film | By Ade Femzo

The Build Up 2 | Drama Short Film | By Ade Femzo

These Affordable Knives Are Better Than Mora!? | Marttiini Knives

These Affordable Knives Are Better Than Mora!? | Marttiini Knives

Textual Content

Textual Content

Fundamentals Of Mixing: EQ (Part 1) #Mixinglessonsinnepali

Fundamentals Of Mixing: EQ (Part 1) #Mixinglessonsinnepali

Stunning Stylish And Elegant Bodycon /Sheath Dresses For Stylish Girls

Stunning Stylish And Elegant Bodycon /Sheath Dresses For Stylish Girls

10-min follow-along TURNOUT WORKOUT with BALLERINA Maria Khoreva

10-min follow-along TURNOUT WORKOUT with BALLERINA Maria Khoreva

This Newsletter tool is Just Better and Cheaper than Mailchimp | Email Tool for Content Creators

This Newsletter tool is Just Better and Cheaper than Mailchimp | Email Tool for Content Creators

Agnes Obel - Familiar (Official Video)

Agnes Obel - Familiar (Official Video)

The Stable Song

The Stable Song

Winter Jazz and Fireplace Ambience - December Christmas Holidays Jazz Music for Coffee Shop

Winter Jazz and Fireplace Ambience - December Christmas Holidays Jazz Music for Coffee Shop

MIKEL ARTETA RATES THE SIDEMENS FOOTBALL ABILITY

MIKEL ARTETA RATES THE SIDEMENS FOOTBALL ABILITY

🔴COMMENT YOUR DREAM PET! YOU HAVE 2 HOURS! ADOPT ME ROBLOX TRADE PET EGG LEGENDARY MEGA NEON DIAMOND

🔴COMMENT YOUR DREAM PET! YOU HAVE 2 HOURS! ADOPT ME ROBLOX TRADE PET EGG LEGENDARY MEGA NEON DIAMOND

More Miseries For Oscar Sudi As Details Emerge On Academic Qualifications  After Threatening Tarus

More Miseries For Oscar Sudi As Details Emerge On Academic Qualifications After Threatening Tarus

Existence & Margot Reisinger -- Om Mani Padme Hum

Existence & Margot Reisinger -- Om Mani Padme Hum

ΑΝΟΡΘΩΣΗ - AEK 1-2  Highlights (25/10/2021)

ΑΝΟΡΘΩΣΗ - AEK 1-2 Highlights (25/10/2021)

HRVY - Personal lyrics

HRVY - Personal lyrics

Machine Gun Kelly - LATELY (Official Music Video)

Machine Gun Kelly - LATELY (Official Music Video)

Put aside - W14D3 - Daily Phrasal Verbs - Learn English online free video lessons

Put aside - W14D3 - Daily Phrasal Verbs - Learn English online free video lessons

Super High Roller Bowl VI | $300,000 Main Event | Day 1

Super High Roller Bowl VI | $300,000 Main Event | Day 1

I've grown accustomed to his face

I've grown accustomed to his face

Liam Lynch: United States of Whatever

Liam Lynch: United States of Whatever

Be confident with our products that designed to suit your lifestyle.

Be confident with our products that designed to suit your lifestyle.

KRYON 2021 ~ Explains Why You Should Expect A Significant Intuition Increase

KRYON 2021 ~ Explains Why You Should Expect A Significant Intuition Increase

What Actually Happens When You File For Bankruptcy

What Actually Happens When You File For Bankruptcy

How I Grew My Hair Back  | My Hair Loss Journey and Treatment

How I Grew My Hair Back | My Hair Loss Journey and Treatment

System of a Down Greatest Hits Vol.1

System of a Down Greatest Hits Vol.1

Moveable and Fixed Do - Teaching Tip

Moveable and Fixed Do - Teaching Tip

MAIYARAP - Try To

MAIYARAP - Try To

Why Most Marriages Crash in Nigeria and Africa as a Result of Childlessness

Why Most Marriages Crash in Nigeria and Africa as a Result of Childlessness

Awaiting

Awaiting

How to install air conditioner // Εγκατασταση κλιματιστικου μηχανηματος //  τοποθετηση κλιματιστικου

How to install air conditioner // Εγκατασταση κλιματιστικου μηχανηματος // τοποθετηση κλιματιστικου

Lady Antebellum - Need You Now

Lady Antebellum - Need You Now

Jason Mraz - Lucky (feat. Colbie Caillat) [Official Video]

Jason Mraz - Lucky (feat. Colbie Caillat) [Official Video]

Can we really change?

Can we really change?

Physically strongest player in the world

Physically strongest player in the world

SOILWORK - Death In General (OFFICIAL VIDEO)

SOILWORK - Death In General (OFFICIAL VIDEO)

Sofia Carson - Ins and Outs (Official Music Video)

Sofia Carson - Ins and Outs (Official Music Video)

Have You Gotten Used to Living Here? - Adjectives with Prepositions

Have You Gotten Used to Living Here? - Adjectives with Prepositions

What is Toxicology? The Science of Poisons Explained

What is Toxicology? The Science of Poisons Explained

Tucker: I'm stunned

Tucker: I'm stunned

Building an Off Grid Log Cabin Alone in the Wilderness, Ep5, Wood Pegs

Building an Off Grid Log Cabin Alone in the Wilderness, Ep5, Wood Pegs

IMMINENCE - Chasing Shadows & Alleviate (OFFICIAL VIDEO)

IMMINENCE - Chasing Shadows & Alleviate (OFFICIAL VIDEO)

Libra - Giving With A Purpose ?

Libra - Giving With A Purpose ?

Mtn Dew EveryDew Chug (2021 Edition) In the HUGE Gallon Glass!

Mtn Dew EveryDew Chug (2021 Edition) In the HUGE Gallon Glass!

Quick intro to ENVISION Visual Thinkers Virtual Expo | Sept 17-19, 2021

Quick intro to ENVISION Visual Thinkers Virtual Expo | Sept 17-19, 2021

Khalid - Location (Lyrics)

Khalid - Location (Lyrics)

Has Your Amazing Connection Fizzled?

Has Your Amazing Connection Fizzled?

How to run Evidently using the Command Line

How to run Evidently using the Command Line

Sleepy Dog Wants Dad to Carry Him || ViralHog

Sleepy Dog Wants Dad to Carry Him || ViralHog